Electron beam evaporation

High energy density of electron beam evaporators allows you to evaporate a huge amount of various materials. Along with low-melting and high-melting metals, such materials include metal oxides and ceramics. Thanks to the chamber with a load lock module in combination with a powerful cryogenic turbopump system, we can ensure that the vacuum generated is excellent.

Along with the system of radiant heating and plasma pre-treatment, our plants use an electron beam evaporator with multiple crucibles. Thanks to corrective plates, the difference in the thickness of a deposited layer is less than 1% even on large substrates. It may be combined with other methods of PVD (e.g., ion plasma deposition, ion beam deposition).