Vacuum machine control device

In the simplest case, the equipment is controlled by means of a discrete control system. For a more complex task, the machine can also be controlled through a PLC and PC. In recent years, our CREACONTROL® module has obtained exceptional significance. The software developed on the basis of LabVIEW® allows our customers from the R&D Center to implement their own software development. Simple integration of standard units is implemented via Plug-and-Play technology. Such


Such units include:

  • Rotary vane, spiral, turbomolecular pumps
  • Vacuum meters, mass flow controllers, valves
  • Evaporators, sources of ion and electron beam deposition
  • Quartz film thickness gages